Stemme, GÖran: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication of silicon-on-integrated-circuit (SOIC) wafers in 3D integration of MEMS and ICs

Frank Niklaus, Adit Decharat, Fredrik Forsberg, Niclas Roxhed, Martin Lapisa, Michael Populin, Fabian Zimmer, Jörn Lemm, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 894 KB

english, 2009

2

Scalable manufacturing of single nanowire devices using crack-defined shadow mask lithography

Enrico, Alessandro, Dubois, Valentin, Niklaus, Frank, Stemme, Göran

Journal:

ACS Applied Materials & Interfaces

Year:

2019

Language:

english

File:

PDF, 3.12 MB

english, 2019

3

A valveless diffuser/nozzle-based fluid pump

Erik Stemme, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 731 KB

english, 1993

4

Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure

Frank Niklaus, Adit Decharat, Christer Jansson, Göran Stemme

Journal:

Infrared Physics & Technology

Year:

2008

Language:

english

File:

PDF, 644 KB

english, 2008

5

Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps

Anders Olsson, Göran Stemme, Erik Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.33 MB

english, 2000

6

SPIE Proceedings [SPIE Defense and Security Symposium - Orlando, FL (Monday 9 April 2007)] Infrared Technology and Applications XXXIII - Uncooled infrared bolometer arrays operating in a low to medium vacuum atmosphere: performance model and tradeoffs

Niklaus, Frank, Jansson, Christer, Decharat, Adit, Källhammer, Jan-Erik, Pettersson, Håkan, Stemme, Göran, Andresen, Bjørn F., Fulop, Gabor F., Norton, Paul R.

Year:

2007

Language:

english

File:

PDF, 700 KB

english, 2007

7

A balanced resonant pressure sensor

Erik Stemme, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 936 KB

english, 1990

8

Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors

Korbinian Kunz, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 263 KB

english, 2001

9

A free-hanging strain-gauge for ultraminiaturized pressure sensors

Patrik Melvås, Edvard Kälvesten, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 384 KB

english, 2002

10

A high-stroke, high-pressure electrostatic actuator for valve applications

Wouter van der Wijngaart, Håkan Ask, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 556 KB

english, 2002

11

A temperature compensated dual beam pressure sensor

Patrik Melvås, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 520 KB

english, 2002

12

Valve-less diffuser micropumps fabricated using thermoplastic replication

Anders Olsson, Olle Larsson, Johan Holm, Lars Lundbladh, Ove Öhman, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 706 KB

english, 1998

13

Robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating

Donato Clausi, Henrik Gradin, Stefan Braun, Jan Peirs, Göran Stemme, Dominiek Reynaerts, Wouter van der Wijngaart

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 1.43 MB

english, 2013

14

Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays

Forsberg, Fredrik, Roxhed, Niclas, Fischer, Andreas C., Samel, Björn, Ericsson, Per, Hoivik, Nils, Lapadatu, Adriana, Bring, Martin, Kittilsland, Gjermund, Stemme, Göran, Niklaus, Frank

Journal:

Infrared Physics & Technology

Year:

2013

Language:

english

File:

PDF, 1.75 MB

english, 2013

15

Low-temperature full wafer adhesive bonding

Niklaus, Frank, Enoksson, Peter, Kälvesten, Edvard, Stemme, Göran

Journal:

Journal of Micromechanics and Microengineering

Year:

2001

Language:

english

File:

PDF, 327 KB

english, 2001

16

Wafer-Scale Manufacturing of Bulk Shape-Memory-Alloy Microactuators Based on Adhesive Bonding of Titanium–Nickel Sheets to Structured Silicon Wafers

Braun, Stefan, Sandstrom, Niklas, Stemme, GÖran, van der Wijngaart, Wouter

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 1.05 MB

english, 2009

17

Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications

Lapisa, Martin, Zimmer, Fabian, Stemme, Göran, Gehner, Andreas, Niklaus, Frank

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 1.79 MB

english, 2012

18

Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices

Sterner, Mikael, Roxhed, Niclas, Stemme, Göran, Oberhammer, Joachim

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 1.95 MB

english, 2011

19

A Low-Temperature Thermopneumatic Actuation Principle for Gas Bubble Microvalves

van der Wijngaart, Wouter, Chugh, Dipankar, Man, Elisabeth, Melin, Jessica, Stemme, Goran

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 1.04 MB

english, 2007

20

Design and Wafer-Level Fabrication of SMA Wire Microactuators on Silicon

Clausi, Donato, Gradin, Henrik, Braun, Stefan, Peirs, Jan, Stemme, Göran, Reynaerts, Dominiek, van der Wijngaart, Wouter

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 1.05 MB

english, 2010

21

One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration

Zimmer, Fabian, Lapisa, Martin, Bakke, Thor, Bring, Martin, Stemme, Göran, Niklaus, Frank

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 1.09 MB

english, 2011

22

Integrating MEMS and ICs

Fischer, Andreas C., Forsberg, Fredrik, Lapisa, Martin, Bleiker, Simon J., Stemme, Göran, Roxhed, Niclas, Niklaus, Frank

Journal:

Microsystems & Nanoengineering

Year:

2015

Language:

english

File:

PDF, 9.04 MB

english, 2015

23

Through Silicon Vias With Invar Metal Conductor for High-Temperature Applications

Asiatici, Mikhail, Laakso, Miku J., Fischer, Andreas C., Stemme, Goran, Niklaus, Frank

Journal:

Journal of Microelectromechanical Systems

Year:

2017

Language:

english

File:

PDF, 4.31 MB

english, 2017

24

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Microneedle-based system for minimally invasive continuous monitoring of glucose in the dermal interstitial fluid

Ribet, Federico, Stemme, Goran, Roxhed, Nielas

Year:

2018

Language:

english

File:

PDF, 417 KB

english, 2018

25

A silicon sensor for measurement of liquid flow and thickness of fouling biofilms

Manne Stenberg, Göran Stemme, Gjermund Kittilsland, Karsten Pedersen

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 1.95 MB

english, 1988

26

A sub-micron particle filter in silicon

Gjermund Kittilsland, Göran Stemme, Bengt Nordén

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 483 KB

english, 1990

27

A small-size silicon microphone for measurements in turbulent gas flows

Edvard Kälvesten, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 604 KB

english, 1994

28

Fluid density sensor based on resonance vibration

Peter Enoksson, Göran Stemme, Erik Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 414 KB

1995

29

A valve-less planar fluid pump with two pump chambers

Anders Olsson, Göran Stemme, Erik Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 645 KB

1995

30

An integrated pressure—flow sensor for correlation measurements in turbulent gas flows

Edvard Kälvesten, Christian Vieider, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 688 KB

english, 1996

31

A lift force sensor with integrated hot-chips for wide range flow measurements

Niklas Svedin, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 431 KB

english, 2003

32

Micromachined barbed spikes for mechanical chip attachment

Patrick Griss, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 386 KB

english, 2002

33

A micropneumatic-to-vibration energy converter concept

Wouter van der Wijngaart, Audrey Berrier, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 384 KB

english, 2002

34

A method to maintain wafer alignment precision during adhesive wafer bonding

Frank Niklaus, Peter Enoksson, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 94 KB

english, 2003

35

Dynamic actuation of polyimide V-groove joints by electrical heating

Thorbjörn Ebefors, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 729 KB

english, 1998

36

Silicon tube structures for a fluid-density sensor

Peter Enoksson, Göran Stemme, Erik Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 311 KB

english, 1996

37

A lift-force flow sensor designed for acceleration insensitivity

Niklas Svedin, Edvard Kälvesten, Erik Stemme, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 563 KB

english, 1998

38

New CO2 filters fabricated by anodic bonding at overpressure in CO2 atmosphere

Thierry Corman, Edvard Kälvesten, Matti Huiku, Kurt Weckström, Pekka Meriläinen, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 737 KB

english, 1998

39

Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection

Thierry Corman, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 767 KB

english, 1998

40

Dynamic simulation model for a vibrating fluid density sensor

Timo Veijola, Thierry Corman, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.46 MB

english, 1999

41

A disposable lab-on-a-chip platform with embedded fluid actuators for active nanoliter liquid handling

Björn Samel, Volker Nock, Aman Russom, Patrick Griss, Göran Stemme

Journal:

Biomedical Microdevices

Year:

2007

Language:

english

File:

PDF, 576 KB

english, 2007

42

Membrane-sealed hollow microneedles and related administration schemes for transdermal drug delivery

Niclas Roxhed, Patrick Griss, Göran Stemme

Journal:

Biomedical Microdevices

Year:

2008

Language:

english

File:

PDF, 352 KB

english, 2008

43

Microfluidic devices for studies of primary cilium mediated cellular response to dynamic flow conditions

Susanna Rydholm, Thomas Frisk, Jacob M. Kowalewski, Helene Andersson Svahn, Göran Stemme, Hjalmar Brismar

Journal:

Biomedical Microdevices

Year:

2008

Language:

english

File:

PDF, 542 KB

english, 2008

44

A CMOS integrated silicon gas-flow sensor with pulse-modulated output

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 1.16 MB

english, 1988

45

A capacitively excited and detected resonant pressure sensor with temperature compensation

Erik Stemme, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 1.61 MB

english, 1992

46

Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows

Edvard Kälvesten, Lennart Löfdahl, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 455 KB

1995

47

3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching

Andreas C. Fischer, Lyubov M. Belova, Yuri G. M. Rikers, B. Gunnar Malm, Henry H. Radamson, Mohammadreza Kolahdouz, Kristinn B. Gylfason, Göran Stemme, Frank Niklaus

Journal:

Advanced Functional Materials

Year:

2012

Language:

english

File:

PDF, 1.22 MB

english, 2012

48

SPIE Proceedings [SPIE Defense and Security Symposium - Orlando, FL (Monday 9 April 2007)] Infrared Technology and Applications XXXIII - Low-cost far infrared bolometer camera for automotive use

Vieider, Christian, Wissmar, Stanley, Ericsson, Per, Halldin, Urban, Niklaus, Frank, Stemme, Göran, Källhammer, Jan-Erik, Pettersson, Håkan, Eriksson, Dick, Jakobsen, Henrik, Kvisterøy, Terje, Franks,

Year:

2007

Language:

english

File:

PDF, 417 KB

english, 2007

49

A method for tapered deep reactive ion etching using a modified Bosch process

Roxhed, Niclas, Griss, Patrick, Stemme, Göran

Journal:

Journal of Micromechanics and Microengineering

Year:

2007

Language:

english

File:

PDF, 289 KB

english, 2007

50

A MEMS-based passive air flow regulator for handheld breath diagnostics

Johansson, Staffan B., Stemme, Göran, Roxhed, Niclas

Journal:

Sensors and Actuators A: Physical

Year:

2014

Language:

english

File:

PDF, 1.80 MB

english, 2014

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски